IGZO Sputtering Target
1- IGZO (氧化铟镓锌) 靶
- IGZO Sputtering Target
- In2O3+Ga2O3+ZnO; 3N5, 4N
- φ25-100mm * 3-6mm thickness, L300-700mm or according to the customer's
- Relative density≥99%
- TFT
Sputtering Targets
- 产品详情-Products Details
IGZO(InGaZnO) Sputtering Target
Form : Blue grey disc, tube
Rotating target and plane target is optional.
Composition ratio: In2O3: ZnO (% wt) = 90:10 / 70:30
