TiOx Target
2- 氧化钛靶材
- TiOx Target
- Titanium + Oxide；4N
- ø355,6 x 10 mm ; L4000mm or according to customers' requirments.
- >80%
- 2.35
- Low-E coated glass; Tool coating, Decoration coating
Sputtering Targets
- 产品详情-Products Details
Form : tube, disc
Formula: TiOx, where X is: 1.68-1.80.
ø355,6 x 10 mm ; L4000mm
Backing Plate Bonding is optional.
Preparation method includes: proportioning raw titanium oxide and Ti according to TiOx, where x is between 1.68-1.80 and mixed evenly; Forming by hot pressing or cold pressing to make the required shape; Put the material in the crucible or special tooling, transfer it to the vacuum sintering furnace, vacuum the whole system, raise the temperature to 1400 ~ 1800 ℃, keep it for 2 ~ 8 hours at the maximum temperature, and then start cooling to prepare titanium oxide material.