Tantalum Sputtering Target
13- 钽靶
- Tantalum Sputtering Target
- Tantalum；3N5, 4N
- Φ(25mm-800mm) x (3mm～28mm); (1mm～25mm)x≤(10mm-800mm)x≤2000mm
- 16.69
- 2.160
- Semiconductor and optical coating
Sputtering Targets
- 产品详情-Products Details
Form : Grey Round, Rectangle
Grade : TA1，TA2
Weight : 1 -2 (kg/piece)
State: annealed (M) or hard (Y)
Tantalum target: tantalum plane target, tantalum multi arc target
Grade: RO5200, RO5400, RO5252 (Ta-2.5W), RO5255 (Ta-10W)
Tolerance: Dia tolerance + / - 0.254;
Recrystallization: ≥95%;
Grain size: ≥40μm；
Surface roughness: ≤Ra 0.8;
Flatness: ≤0.1mm or 0.10%